This will improve the resolution greatly compared to regular optical microscopes, but it adds a very critical challenge: conventional lenses do not exist for this wavelength regime. “This new source allows us to go to very small wavelengths up to the Soft X-Ray regime, namely 8 to 30 nanometers”, says PhD candidate Sven Weerdenburg of the Optics Research Group. So the resolution can be improved by using shorter wavelengths and higher quality lenses. In general, the minimum size of an object that can be imaged with a microscope depends on the quality of the lenses and the wavelength of the light used to observe the tiny object. But since these features are becoming extremely small (already 10.000 times smaller than a human hair), imaging these defects is a real challenge. Imaging, metrology and inspection are required to observe these defects and further improve the chips. However, the manufacturing process is not perfect, leading to defects in the chips. With the rise of the Internet of Things (IoT), the demand for these next-generation chips is growing. The continuous innovations in the semiconductor industry are leading to ever smaller and more efficient integrated circuits or computer chips. The aim of this consortium is to generate new techniques to image extremely small features in 3D, for example on next generation computer chips. This source will play a key role within the LINX-consortium, which TU Delft leads.
#Coherent x ray free
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